The 839-101612-887 LAM is an electrostatic chuck(ESC)component manufactured by LAM Research Corporation(LAM Corporation).This component is a key component in the semiconductor manufacturing process and is primarily used to ensure that the chip is firmly secured and properly aligned during the etching and ashing steps.
2.Product parameters
The following are the main parameters of the 839-101612-887 LAM product:
Part Number:839-101612-887
Product Type:Electrostatic Chuck(ESC)components
Chuck size:200mm
Voltage range:0~1000V
Current capacity:10A
Vacuum compatibility:Supported
Coolant compatibility:Supported
Third,product application
839-101612-887 LAM products are mainly used in etching and ashing processes of semiconductor wafers.During the etching process,the electrostatic sucker can firmly adsorb the wafer,preventing it from moving or deforming during the etching process,thus ensuring the accuracy and uniformity of the etching.In the ashing process,the electrostatic suction cup also plays an important role in ensuring that the chip remains stable during the ashing process and improves the ashing efficiency and quality.In addition,the component is also suitable for a variety of advanced semiconductor manufacturing equipment to meet the needs of different customers.
4.Brand introduction
LAM Research Corporation(LAM Corporation)is a company with significant influence in the field of semiconductor manufacturing equipment.The company is committed to the development and production of high-quality semiconductor manufacturing equipment to provide advanced solutions for the global semiconductor industry.LAM’s products cover a wide range of fields such as etching machines,deposition equipment,cleaning equipment,and are widely used in the pre-and post-semiconductor manufacturing processes.With its superior technical strength and innovation capabilities,LAM has gained an important position in the global semiconductor market.
In addition,LAM company also focuses on cooperation and communication with customers,actively understand customer needs and feedback,and constantly optimize products and services.Its professional technical support and after-sales service team can provide customers with timely and effective technical support and solutions to ensure that customers get the best experience in the use of the process.
In summary,the 839-101612-887 LAM,as an electrostatic suction cup component produced by LAM Company,plays an important role in the semiconductor manufacturing process.Its excellent performance and wide range of applications make the product one of the important components in semiconductor manufacturing.At the same time,LAM,as a leader in the field of semiconductor manufacturing equipment,has made important contributions to the development of the global semiconductor industry.
