ZYGO Corporation:
Zygo is a global leader in the design and manufacture of precision optical metrology systems, custom optics and complex optoelectronic systems.
Their products are widely used in semiconductor, optical, aerospace and other high-tech industries.
4104C:
4104C is a measurement electronic device from Zygo and belongs to their family of nano-positioning sensors/displacement measurement interferometers.
It is an electronic module for high precision displacement measurement.
The device is used to make precise measurements of extremely small displacements.
2. Product parameters
According to Zygo’s official website, the following are some key parameters of 4104C:
Number of shafts/plates: 4
Maximum synchronous unit: 16
Minimum optical power: 0.07µW
Position resolution: 0.15 nm
Maximum speed: ± 2.55m /s
Accuracy (σ) at maximum speed: 0.2 nm
Loop error compensation: Yes
Compatible lasers: 7702, 7714 and 7724
3. Advantages and characteristics
High precision: Displacement measurement at the nanoscale can be achieved.
High reliability: Suitable for demanding industrial environments.
Multi-axis measurement: Support multi-axis synchronous measurement.
Advanced error compensation: with circular error compensation function.
4. Application fields and application cases
Semiconductor manufacturing: For wafer inspection and lithography equipment.
Optical manufacturing: Used for precision measurement of optical components.
Precision machine tools: used for positioning and measuring machine tools.
Scientific research: For nanotechnology and materials science research.
5. Comparison of competitive products
Zygo has a strong reputation in the field of optical metrology and its products are known for high precision and reliability. Compared with similar products from other brands, Zygo’s products have advantages in terms of accuracy and stability.
6. Selection suggestions
Select the right model according to the specific application requirements.
Consider measuring range, accuracy and speed requirements.
Ensure compatibility with existing optical systems.
