Product Overview
The ZYGO ZMI4104 is a high-performance, multi-axis measurement board designed for ultra-precise displacement and distance measurements. As part of ZYGO’s renowned ZMI (Zygo Measurement Interferometer) product line, the ZMI4104 leverages advanced interferometry technology to achieve sub-nanometer resolution and exceptional accuracy. This measurement board is typically integrated into sophisticated metrology systems requiring the highest levels of precision, such as those found in semiconductor manufacturing, nanotechnology research, and advanced optical fabrication. The ZYGO ZMI4104 is engineered to process optical signals from ZYGO laser interferometers, calculating displacement with remarkable stability and speed. Often implemented in a VME or VME64x form factor, the ZMI4104 can be modularly added to systems, allowing for scalability up to numerous axes of synchronized measurements. Its robust design and advanced signal processing capabilities make the ZMI4104 a critical component for applications demanding nanoscale precision and control.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | ZMI4104 |
| Manufacturer | ZYGO |
| Product Type | Multi-Axis Measurement Board |
| Number of Axes | Typically 1 or 2 (up to 4 depending on configuration) |
| Interface Type | VME64x |
| Position Resolution | Down to 0.15 nm (depending on configuration and interferometer) |
| Maximum Velocity | Up to ±2.55 m/s (depending on configuration and interferometer) |
| Minimum Optical Power | Typically around 0.07 µW (for double-pass interferometer) |
| Accuracy | Better than nanometer level (system dependent) |
| Communication Interface | Dependent on system integration (e.g., via VME backplane) |
| Synchronization | Supports synchronization with multiple units for multi-axis systems |
| Operating Temperature | Typically specified for cleanroom or laboratory environments (consult datasheet) |
Main Features and Advantages
The ZYGO ZMI4104 measurement board offers a suite of features that provide significant advantages in high-precision metrology applications. Its primary strength lies in its ability to deliver extremely high resolution and accuracy in displacement measurements, enabling advancements in fields requiring nanoscale precision. The ZMI4104 is designed to seamlessly interface with ZYGO’s high-stability laser sources and interferometers, creating a complete and optimized measurement system.
Sub-Nanometer Resolution: The ZYGO ZMI4104 achieves measurement resolutions down to the picometer level when used with appropriate interferometers and configurations, providing unparalleled detail in displacement measurements.
High Accuracy and Stability: Engineered for minimal noise and drift, the ZMI4104 ensures highly accurate and stable measurements over extended periods, crucial for critical metrology applications.
Multi-Axis Capability: The board can support one or more axes of measurement and can be synchronized with other ZMI4104 units or other ZYGO measurement electronics to create sophisticated multi-axis motion control and metrology systems.
VME64x Integration: The VME64x form factor allows for easy integration into industry-standard VME-based systems, offering a robust and scalable platform for complex automation and metrology setups.
Advanced Signal Processing: The ZYGO ZMI4104 incorporates sophisticated signal processing techniques to extract precise displacement information from the interferometer signals, often including features like Cyclic Error Correction to further enhance accuracy.
High Data Rates: The board is capable of processing and outputting measurement data at high rates, enabling real-time tracking of fast-moving objects in dynamic applications.
