Product Introduction
The AMAT 0010-01412, known as the Actuator Assembly for the Slit Liner Door, is a critical component in Applied Materials’ Centura 5200 Etch semiconductor manufacturing equipment. This AMAT 0010-01412 plays a fundamental role in the precise and reliable operation of the wafer processing chamber by controlling the movement of the slit liner door. Applied Materials, a leading provider of equipment, services, and software for the fabrication of integrated circuits, designs components like the AMAT 0010-01412 to meet the stringent demands of semiconductor manufacturing. The technical positioning of the AMAT 0010-01412 emphasizes its importance in maintaining the vacuum integrity and process environment within the etching chamber, directly impacting wafer quality and production yield. As an integral part of the automation system within the Centura 5200 platform, the AMAT 0010-01412 ensures the seamless transfer of wafers into and out of the processing module, contributing significantly to the overall efficiency and throughput of the semiconductor fabrication process.
Core Advantages and Technical Highlights
The AMAT 0010-01412 Actuator Assembly for the Slit Liner Door offers several key advantages essential for the demanding environment of semiconductor manufacturing:
Precise Control: The 0010-01412 is engineered to provide accurate and repeatable control over the opening and closing of the slit liner door. This precision is crucial for maintaining the integrity of the vacuum and process gases within the etching chamber, thereby ensuring consistent wafer processing.
High Reliability: Designed by Applied Materials, a trusted name in the semiconductor industry, the AMAT 0010-01412 is built for high reliability and durability. This minimizes downtime and ensures consistent performance over extended periods, which is paramount in continuous manufacturing operations.
Seamless Integration: The AMAT 0010-01412 is specifically designed for integration with the slit liner door mechanism within the Centura 5200 Etch system. This ensures proper fit and function, simplifying installation and guaranteeing optimal performance.
Vacuum Integrity: The actuator assembly plays a vital role in maintaining the vacuum seal of the processing chamber. Its precise operation ensures that the slit liner door closes securely, preventing leaks and maintaining the required process environment for critical etching steps.
Optimized Throughput: By enabling the efficient and reliable transfer of wafers, the AMAT 0010-01412 contributes to maximizing the throughput of the semiconductor fabrication line. Its consistent operation minimizes delays and ensures a smooth flow of wafers through the etching module.
Robust Design: Built to withstand the demanding conditions within semiconductor processing equipment, the 0010-01412 features a robust design that ensures longevity and consistent performance, even under frequent use.
Typical Application Scenarios
The AMAT 0010-01412 Actuator Assembly for the Slit Liner Door is exclusively used within Applied Materials’ Centura 5200 Etch systems in semiconductor fabrication facilities. In these critical environments, the AMAT 0010-01412 is responsible for the precise opening and closing of the slit liner door, which controls the access of silicon wafers into and out of the etching chamber. This process is fundamental to creating the intricate patterns on semiconductor wafers that form the basis of microelectronic devices. The reliability and accuracy of the AMAT 0010-01412 directly impact the efficiency and yield of the etching process, which is a core step in the overall semiconductor manufacturing workflow. Maintaining the integrity of the vacuum and process gases during wafer transfer, facilitated by the AMAT 0010-01412, is crucial for achieving the desired etching uniformity and quality across the wafer surface. Therefore, the AMAT 0010-01412 is an indispensable component in ensuring the high-precision and high-throughput manufacturing of advanced semiconductor devices.
Related Model Recommendations
Given that the AMAT 0010-01412 is a specific component within the Applied Materials Centura 5200 Etch system, related models would likely be other spare parts or assemblies within the same equipment platform:
- AMAT Slit Liner Door (various part numbers): The door itself that the 0010-01412 actuates. Different door designs might exist for specific process requirements.
- AMAT Vacuum Seals and O-rings (various part numbers): Components that ensure the vacuum integrity of the slit liner door and the processing chamber. Reliable operation of the 0010-01412 is crucial for maintaining these seals.
- AMAT Wafer Handling Robots (various model numbers): Robots responsible for transferring wafers to and from the slit liner door, interacting with the opening and closing controlled by the 0010-01412.
- AMAT Process Chamber Components (various part numbers): Other parts within the Centura 5200 Etch chamber, such as electrodes, gas distribution plates, and liners, which work in conjunction with the wafer transfer facilitated by the 0010-01412.
- AMAT Control System Modules for Centura 5200 (various part numbers): Electronic control units that send signals to the 0010-01412 to initiate the opening and closing of the slit liner door, based on the process recipe and wafer handling sequence.
