Based on the available information, the AMAT 0010-07061 is identified as an MKS MFC (Mass Flow Controller) Pressure Controller, Type 649. This component is used in Applied Materials (AMAT) semiconductor manufacturing equipment, likely within the Centura platform or similar systems, for precise control of gas flow and pressure.
Detailed Parameter Table
Product Introduction
The AMAT 0010-07061 is a precision Mass Flow Controller (MFC) and Pressure Controller, specifically the MKS Type 649 (often the 649A12T51CAVR-S variant), integrated into Applied Materials (AMAT) semiconductor manufacturing equipment. This AMAT 0010-07061 is essential for the accurate regulation of gas flow and pressure within the critical processing chambers of AMAT systems, such as those used for etching or deposition. While branded and utilized by Applied Materials, the AMAT 0010-07061 is originally manufactured by MKS Instruments, a leading provider of critical gas analysis, delivery, and control solutions. The technical positioning of the AMAT 0010-07061 underscores its vital role in maintaining the precise process environment required for high-yield semiconductor fabrication. By ensuring accurate and stable gas delivery, the AMAT 0010-07061 directly contributes to the uniformity and repeatability of semiconductor manufacturing processes, making it a key component in the overall automation and control of AMAT equipment.
Core Advantages and Technical Highlights
The AMAT 0010-07061 MFC / Pressure Controller offers several key advantages crucial for the demanding requirements of semiconductor manufacturing:
Precise Gas Flow and Pressure Control: The 0010-07061, being an MKS Type 649, is designed for highly accurate and repeatable control of gas flow rates and pressure within the process chamber. This precision is fundamental for achieving the desired thin film properties or etch rates in semiconductor fabrication.
High Reliability: MKS Instruments is renowned for its reliable and robust MFCs, and the AMAT 0010-07061 is no exception. Its durable design ensures consistent performance over extended periods, minimizing downtime in critical semiconductor manufacturing operations.
Seamless AMAT System Integration: As a component specifically selected and integrated by Applied Materials, the AMAT 0010-07061 is designed for seamless compatibility with AMAT equipment, ensuring proper communication and control within the overall system architecture.
Fast Response Time: MFCs like the MKS Type 649 are known for their rapid response to changes in setpoints, allowing for dynamic control of gas flow and pressure, which can be crucial for complex semiconductor processes.
Wide Range of Gas Compatibility: Depending on the specific variant, the AMAT 0010-07061 can be configured to handle a variety of process gases used in semiconductor manufacturing, offering versatility for different applications.
Integrated Diagnostics: Modern MFCs often include diagnostic features that allow for monitoring of their performance and detection of potential issues, contributing to proactive maintenance and reduced downtime.
