Based on the available information, the AMAT 0010-14157 is a HORIBA H1061 Monochromator Module Assembly. This component is used in Applied Materials (AMAT) semiconductor manufacturing equipment, specifically for endpoint detection in plasma etching processes.

Product Introduction

The AMAT 0010-14157 is a crucial Monochromator Module Assembly, specifically the HORIBA H1061, integrated into Applied Materials (AMAT) semiconductor manufacturing equipment. This AMAT 0010-14157 plays a vital role in endpoint detection during plasma etching processes, allowing for precise control over the removal of materials from silicon wafers. While utilized by Applied Materials, the AMAT 0010-14157 is originally manufactured by HORIBA, a renowned leader in analytical and measurement systems. The technical positioning of the AMAT 0010-14157 highlights its importance in ensuring process accuracy and repeatability, which are paramount for achieving high yields in semiconductor fabrication. By analyzing the optical emission spectrum of the plasma, the AMAT 0010-14157 enables real-time monitoring of the etching process and signals when the desired endpoint is reached, making it an indispensable component in the automation and control of AMAT etch systems.

Core Advantages and Technical Highlights

The AMAT 0010-14157 HORIBA H1061 Monochromator Module Assembly offers several key advantages for endpoint detection in semiconductor etching:

Precise Endpoint Detection: The 0010-14157 allows for accurate determination of the etching endpoint by analyzing the specific wavelengths of light emitted by the plasma. This precise control prevents over-etching or under-etching, ensuring optimal feature definition on the semiconductor wafers.

High Sensitivity: HORIBA monochromators are known for their high sensitivity in detecting weak optical emissions from the plasma, enabling reliable endpoint detection even in challenging etching processes.

Robust and Reliable: Designed for the demanding environment of semiconductor manufacturing, the AMAT 0010-14157 is a robust and reliable component, ensuring consistent performance over extended periods and minimizing downtime.

Seamless AMAT System Integration: As a module specifically integrated into Applied Materials etch systems, the AMAT 0010-14157 is designed for seamless compatibility, ensuring proper communication and data acquisition within the overall system architecture.

Real-Time Monitoring: The 0010-14157 provides real-time data on the plasma emission spectrum, allowing for continuous monitoring of the etching process and immediate detection of the endpoint.

Holographic Grating Technology: The HORIBA H1061 likely utilizes a holographic grating, which provides excellent light dispersion and spectral resolution, crucial for accurate endpoint detection.

Typical Application Scenarios

The AMAT 0010-14157 HORIBA H1061 Monochromator Module Assembly is a critical component in plasma etching processes within Applied Materials’ semiconductor manufacturing equipment, particularly in systems like the Centura. In these applications, the AMAT 0010-14157 is used to monitor the optical emission from the plasma, which changes in intensity at specific wavelengths as the etching of different material layers on the wafer progresses. By detecting these changes, the system can precisely determine when the desired layer has been removed, signaling the endpoint of the etching process. This is essential for fabricating the intricate structures of microelectronic devices with high accuracy and uniformity. The AMAT 0010-14157 is vital in various etching steps, including oxide etching, polysilicon etching, and metal etching, ensuring the critical dimensions and profiles of the etched features meet the stringent requirements of advanced semiconductor manufacturing.

Related Model Recommendations

Given that the AMAT 0010-14157 is a HORIBA H1061 Monochromator Module Assembly integrated into AMAT equipment, related models would include other optical emission spectroscopy components used in AMAT systems or offered by HORIBA:

• HORIBA H1061 variants: Different configurations of the H1061 monochromator with varying wavelength ranges or grating specifications that might be used for different etching processes in AMAT equipment.
• HORIBA other monochromator series (e.g., iHR series): Other monochromator models from HORIBA that might offer different performance characteristics or be integrated into other AMAT platforms.
• AMAT Optical Emission Spectroscopy (OES) Systems: Higher-level assemblies within AMAT etch tools that incorporate monochromators like the 0010-14157 along with detectors, fiber optics, and control electronics for comprehensive endpoint detection.
• Fiber Optic Cables for OES: Cables used to transmit light from the plasma chamber to the monochromator. Different lengths and types might be used with the 0010-14157.
• Photomultiplier Tubes (PMTs) or Detectors for Monochromators: Devices used to detect the intensity of the dispersed light from the monochromator, providing the signal for endpoint detection. Different detectors might be paired with the 0010-14157 based on the wavelength range of interest.

Installation, Commissioning and Maintenance Instructions

Installation preparation: Before installing the AMAT 0010-14157, ensure that the AMAT equipment is properly shut down and isolated from power and process gases according to AMAT safety procedures. Verify that the new 0010-14157 monochromator module assembly is the correct part number and is free from any physical damage, especially to the grating and optical components. Ensure that the fiber optic cables for light input are clean and in good condition. Refer to the specific AMAT equipment manual for detailed installation instructions for the monochromator module, including proper mounting and connection of the fiber optic cables and electrical interfaces. Handle the 0010-14157 with care to avoid contamination of the optical surfaces.

Maintenance suggestions: Regular monitoring of the endpoint detection signal quality is essential to ensure the AMAT 0010-14157 is functioning correctly. Follow the maintenance schedule outlined in the AMAT equipment manual, which may include periodic checks of the fiber optic cables for damage or misalignment. The monochromator itself typically requires minimal maintenance but should be protected from dust and vibration. Any degradation in endpoint detection performance, such as a weak or noisy signal, should be investigated promptly. Replacement of the 0010-14157 should be performed by trained personnel following AMAT’s recommended procedures. Using genuine HORIBA or AMAT-approved replacement parts ensures compatibility and maintains the system’s performance and reliability. Calibration of the OES system, including the monochromator, may be required periodically to ensure accurate endpoint detection.

Service and Guarantee Commitment

Applied Materials, in collaboration with OEM suppliers like HORIBA, is committed to providing high-quality and reliable components for its semiconductor manufacturing equipment, including the AMAT 0010-14157 HORIBA H1061 Monochromator Module Assembly. This part is manufactured to meet stringent quality standards to ensure optimal performance and longevity in demanding semiconductor processing environments. The AMAT 0010-14157 is typically covered under AMAT’s standard warranty for spare parts, providing assurance against manufacturing defects. Applied Materials’ global service and support network offers comprehensive assistance, including technical support, installation guidance, and access to genuine replacement parts. Our experienced technicians are available to provide on-site service and ensure the proper functioning of your AMAT equipment’s endpoint detection systems. We are dedicated to maximizing the uptime and productivity of your semiconductor manufacturing processes through our reliable products and comprehensive support services for components like the AMAT 0010-14157.