0010-23716 AMAT

Based on the available information, the AMAT 0010-23716 is identified as a LOWER ROBOT ASSEMBLY, used in Applied Materials (AMAT) semiconductor manufacturing equipment for wafer handling. This component is a crucial part of the robotic system that transfers silicon wafers between different modules within the processing tool.

Detailed Parameter Table

Parameter name	Parameter value
Product model	0010-23716
Manufacturer	Applied Materials (AMAT)
Product category	Lower Robot Assembly
Application	Semiconductor Manufacturing Equipment (Wafer Handling)
Compatibility	To be determined based on the specific AMAT system (likely Centura or similar 300mm platforms)
Function	Provides the lower arm and associated mechanisms for wafer transfer
Condition	Typically Used or Refurbished (New may be available)
Actuation Type	Likely servo motor driven
Degrees of Freedom	To be determined based on the robot design
Payload Capacity	Designed for 300mm silicon wafers

Product Introduction

The AMAT 0010-23716 is a vital LOWER ROBOT ASSEMBLY employed in Applied Materials (AMAT) advanced semiconductor manufacturing equipment. This AMAT 0010-23716 forms the foundational part of the wafer handling robot, responsible for the lower arm and its associated drive mechanisms that enable the precise and reliable transfer of silicon wafers within the vacuum environment of the processing tool. Manufactured to meet the stringent standards of Applied Materials, a leading supplier of semiconductor equipment, the AMAT 0010-23716 is critical for automating wafer movement between load locks, process chambers, and other modules. Its technical positioning emphasizes high precision, reliability, and speed, all essential for maximizing throughput and minimizing wafer damage in high-volume semiconductor fabrication. As a key component of the automation system, the AMAT 0010-23716 contributes significantly to the overall efficiency and productivity of semiconductor device manufacturing.

Core Advantages and Technical Highlights

The AMAT 0010-23716 LOWER ROBOT ASSEMBLY offers several key advantages for automated wafer handling in semiconductor manufacturing:

Precise Wafer Transfer: The 0010-23716 is engineered to provide accurate and repeatable movement of silicon wafers, ensuring precise placement and retrieval at designated locations within the AMAT equipment.

Robust and Reliable Design: Built to withstand the demanding vacuum environment and continuous operation of semiconductor fabrication, the AMAT 0010-23716 is a robust and reliable assembly, minimizing downtime and ensuring consistent performance.

Seamless AMAT System Integration: As a genuine AMAT part, the AMAT 0010-23716 is designed for seamless integration with Applied Materials’ wafer handling systems, ensuring proper communication and coordination with other robotic components and system controllers.

Optimized for 300mm Wafers: Likely designed for handling 300mm silicon wafers, the 0010-23716 meets the requirements of modern, large-wafer semiconductor manufacturing.

Servo Motor Driven: The assembly is likely driven by servo motors, providing precise control over the robot’s movement, including speed, acceleration, and position.

Contributes to High Throughput: Reliable and fast wafer transfer enabled by the 0010-23716 is crucial for maximizing the throughput of the semiconductor manufacturing line.

Typical Application Scenarios

The AMAT 0010-23716 LOWER ROBOT ASSEMBLY is a fundamental component in the wafer handling systems of Applied Materials’ semiconductor manufacturing equipment, particularly in 300mm platforms like the Centura. It is responsible for the primary movements of the robot arm, typically including extension, retraction, and rotation in the lower plane. This allows the robot to pick up wafers from cassettes in load locks, transfer them to and from process chambers, and move them to other modules within the system. The precise and reliable operation of the AMAT 0010-23716 is essential for the efficient and damage-free movement of delicate silicon wafers through the various stages of semiconductor fabrication. Its role in automating wafer transfer directly impacts the overall productivity and yield of the manufacturing process.

Related Model Recommendations

Given that the AMAT 0010-23716 is a lower robot assembly, related models would likely be other components of the wafer handling robot or related automation parts within the same or similar AMAT systems:

AMAT Upper Robot Assembly (various part numbers): The upper arm and associated mechanisms of the wafer transfer robot, often working in conjunction with the lower assembly.
AMAT Robot End Effector (various part numbers): The part of the robot arm that directly holds and transports the wafer.
AMAT Robot Controller (various model numbers): The electronic control unit that commands the movements of the robot assemblies, including the 0010-23716.
AMAT Robot Drive Motors (various part numbers): The servo motors that actuate the movements of the robot arms and other components.
AMAT Wafer Handling System Components (various part numbers): Other parts of the wafer transfer system, such as vacuum pumps, sensors, and alignment mechanisms.

Installation, Commissioning and Maintenance Instructions

Installation preparation: Before installing the AMAT 0010-23716, ensure that the AMAT semiconductor manufacturing equipment is properly shut down and isolated from power and vacuum according to AMAT safety procedures. Verify that the new or refurbished 0010-23716 lower robot assembly is the correct part number and is free from any physical damage. Refer to the specific AMAT equipment manual for the wafer handling system for detailed step-by-step installation instructions, including proper alignment, mechanical connections, and electrical wiring for the drive motors and any integrated sensors. Ensure that the mounting surfaces are clean and that all necessary hardware is available. Installation should be performed in a clean environment to prevent contamination.

Maintenance suggestions: Regular inspection of the AMAT 0010-23716 for any signs of wear, misalignment, or unusual noise during operation is essential. Follow the maintenance schedule outlined in the AMAT equipment manual for the robot assembly, which may include periodic checks of mechanical linkages, lubrication of moving parts (if applicable), and verification of motor performance. Any erratic robot movement or positioning errors should be investigated promptly. Replacement of the 0010-23716 should be performed by trained personnel following AMAT’s recommended procedures. Using genuine AMAT replacement parts ensures proper fit and function, maintaining the system’s reliability and preventing damage to wafers. Regular calibration of the robot’s movements may also be required to maintain accuracy.

Service and Guarantee Commitment

Applied Materials is committed to providing high-quality and reliable components for its semiconductor manufacturing equipment, including the AMAT 0010-23716 LOWER ROBOT ASSEMBLY. This part is manufactured to meet stringent quality standards to ensure optimal performance and longevity within the demanding vacuum and operational conditions of semiconductor fabrication. The AMAT 0010-23716 is typically covered under AMAT’s standard warranty for spare parts, providing assurance against manufacturing defects. Applied Materials’ global service and support network offers comprehensive assistance, including technical support, installation guidance, and access to genuine replacement parts. Our experienced technicians are available to provide on-site service and ensure the proper functioning of your AMAT equipment’s wafer handling systems. We are dedicated to maximizing the uptime and productivity of your semiconductor manufacturing processes through our reliable products and comprehensive support services for components like the AMAT 0010-23716.