Based on the available information, the AMAT 0010-36160 is identified as an ASSY, CERAMIC RING AND PLATE, LIFT TUBE. This is a component used in Applied Materials (AMAT) semiconductor manufacturing equipment.
Detailed Parameter Table
Product Introduction
The AMAT 0010-36160, identified as an ASSY, CERAMIC RING AND PLATE, LIFT TUBE, is a mechanical assembly utilized in Applied Materials (AMAT) semiconductor manufacturing equipment. This AMAT 0010-36160 likely plays a crucial role in the precise handling of silicon wafers within a process chamber. The ceramic construction suggests it is designed to withstand the high temperatures and harsh environments often encountered in semiconductor fabrication processes. The assembly likely consists of a ceramic ring, a ceramic plate, and a lift tube mechanism, working together to lift and position wafers for various processing steps. As a critical component in the wafer handling system, the AMAT 0010-36160 contributes to the automation and accuracy required for high-yield semiconductor manufacturing.
Core Advantages and Technical Highlights
The AMAT 0010-36160 Ceramic Ring and Plate, Lift Tube Assembly offers several key advantages for wafer handling in semiconductor manufacturing:
Ceramic Construction: The use of ceramic materials provides excellent thermal stability, resistance to chemical corrosion, and low particle generation, all crucial for maintaining a clean and controlled processing environment.
Precise Wafer Lifting and Positioning: The assembly is designed to enable accurate and repeatable lifting and positioning of silicon wafers, ensuring proper alignment for subsequent processing steps.
Durable Design: Built to withstand the demanding conditions within semiconductor processing equipment, the ceramic construction ensures longevity and consistent performance.
Seamless AMAT System Integration: As a genuine AMAT part, the 0010-36160 is designed for seamless integration with Applied Materials’ wafer handling systems, ensuring proper fit and function.
Contributes to Process Reliability: Reliable wafer handling is essential for minimizing wafer damage and ensuring consistent process flow, contributing to the overall reliability of the semiconductor manufacturing process.
Typical Application Scenarios
The AMAT 0010-36160 Ceramic Ring and Plate, Lift Tube Assembly would be found in various process modules within Applied Materials’ semiconductor manufacturing equipment where precise vertical movement and positioning of silicon wafers are required. Potential applications include:
Wafer Transfer Mechanisms: Within process chambers or transfer modules, this assembly could be part of a mechanism that lifts wafers from a lower position (e.g., an electrostatic chuck or pedestal) to an upper position for robotic arm access or vice versa.
Alignment Stages: It might be used in stages where wafers are lifted and aligned to specific features before processing.
Reaction Chambers: In certain deposition or etching chambers, the lift tube mechanism could be involved in moving the wafer to a specific zone within the chamber for processing.
Given the ceramic nature, it is likely used in high-temperature or plasma-rich environments where metallic components might be susceptible to corrosion or particle generation.
Related Model Recommendations
Given that the AMAT 0010-36160 is a ceramic lift tube assembly for AMAT equipment, related models would likely be other components of the wafer handling system or similar mechanical assemblies within the same or similar AMAT systems:
- AMAT Lift Pin Assemblies (various part numbers): Other mechanisms used for lifting wafers, potentially made of different materials or with different designs.
- AMAT Electrostatic Chuck (E-Chuck) Assemblies: The platform from which the lift tube might raise the wafer.
- AMAT Pedestal Assemblies: Similar to E-Chucks, these support the wafer during processing.
- AMAT Wafer Handling Robots (various model numbers): The robots that interact with the lifted wafers.
- AMAT Alignment Fingers or Mechanisms: Components that work in conjunction with the lift tube to ensure precise wafer positioning.
