Description: The 0010-44213 AMAT is identified as an Emissometer from Applied Materials (AMAT). This device is a crucial component in semiconductor manufacturing equipment, likely used for non-contact temperature measurement, specifically within Rapid Thermal Processing (RTP) or similar high-temperature applications.
Application Scenarios: In the intricate process of manufacturing advanced semiconductor wafers, precise temperature control during various thermal processing steps like annealing is paramount. Imagine a scenario where silicon wafers are rapidly heated to extremely high temperatures to modify their electrical properties. In such a critical phase, accurate and real-time temperature monitoring is essential to ensure process uniformity and prevent wafer damage. The 0010-44213 AMAT emissometer, with its non-contact measurement capabilities, would be strategically integrated into the RTP chamber. It would continuously monitor the wafer’s surface temperature, providing crucial feedback to the system’s control loop. Any temperature deviation detected by the 0010-44213 would trigger immediate adjustments to the heating elements, ensuring that each wafer undergoes the precise thermal cycle required for optimal device performance. The reliability and accuracy of the 0010-44213 directly contribute to higher wafer yields and the production of high-quality semiconductor devices.
Parameter
| Main Parameters | Value/Description |
|---|---|
| Product Model | 0010-44213 |
| Manufacturer | Applied Materials (AMAT) |
| Product Category | Emissometer / Pyrometer (Likely) |
| Application | Semiconductor Rapid Thermal Processing (RTP) |
| Measurement Principle | Non-Contact Temperature Measurement (Infrared/Thermal Radiation) |
| Temperature Range | Specification not readily available (Likely high, for RTP applications) |
| Accuracy | Specification not readily available (High accuracy expected for process control) |
| Compatibility | Designed for integration within specific Applied Materials RTP equipment |
| Probe Type | Likely a 2mm probe based on related models |
| Condition | Commonly found as used, new may also be available |
| Associated Part Number | Often linked with 0150-00743 (possibly a related assembly) |
| Mounting | Integrated within the RTP chamber |
Technical Principles and Innovative Values:
- Innovation Point 1: Non-Contact Temperature Sensing: The 0010-44213 AMAT utilizes non-contact thermometry, likely measuring infrared radiation emitted by the wafer to determine its temperature. This prevents contamination and damage to the delicate wafer surface during critical thermal processing.
- Innovation Point 2: Real-Time Monitoring: Designed for integration into RTP systems, the emissometer provides continuous, real-time temperature data, enabling precise control of the rapid heating and cooling cycles essential for advanced semiconductor manufacturing.
- Innovation Point 3: High Accuracy and Stability: Applied Materials, a leader in semiconductor equipment, likely engineers the 0010-44213 for high accuracy and stability in demanding high-temperature environments, ensuring reliable temperature readings for optimal process control.
- Innovation Point 4: Integration within AMAT Systems: As a component specifically designed for AMAT equipment, the 0010-44213 ensures seamless compatibility and optimal performance within the overall system architecture of their RTP platforms.
Application Cases and Industry Value: In a fabrication facility producing advanced logic chips, precise annealing is crucial for achieving the desired electrical characteristics of the transistors. Inconsistent or inaccurate temperature control during this RTP step can lead to variations in device performance and reduced chip yield. By implementing AMAT RTP systems equipped with the Applied Materials 0010-44213 emissometer, process engineers can achieve highly uniform and accurate wafer temperatures during annealing. Feedback from users often highlights the improved wafer-to-wafer temperature uniformity and the resulting increase in device performance and overall yield. The reliable temperature data provided by the 0010-44213 directly translates to more efficient and cost-effective production of high-performance integrated circuits.
Related Product Combination Solutions:
- Applied Materials 0150-00743: Possibly a related high-temperature probe or assembly that works in conjunction with the 0010-44213 within the RTP system.
- Applied Materials RTP Control System Software: AMAT’s software suite that processes the temperature data from the 0010-44213, enabling real-time control of the heating elements and precise execution of thermal recipes.
- KLA-Tencor SpectraFilm F300: A thin-film metrology system that could be used to measure the properties of the films after RTP, providing complementary data to the temperature monitoring provided by the 0010-44213.
- Leybold Vacuum Pumps: Essential for maintaining the controlled atmosphere within the RTP chamber where the 0010-44213 operates, ensuring optimal heat transfer and preventing contamination.
- Watlow or Chromalox Heaters: The heating elements within the RTP system that are precisely controlled based on the temperature feedback from the 0010-44213 to achieve the desired thermal profile.
- Eurotherm Temperature Controllers: External temperature controllers that might interface with the AMAT RTP system and utilize the data from the 0010-44213 for advanced temperature regulation.
- Brooks Automation Wafer Handling System: Precisely moves wafers into and out of the RTP chamber where the temperature is monitored by the 0010-44213, ensuring efficient and safe processing.
- National Instruments CompactRIO: A real-time control and data acquisition platform that could be used to interface with the 0010-44213 and other sensors in the RTP system for advanced monitoring and analysis.
Installation, Maintenance, and Full-Cycle Support: The 0010-44213 AMAT emissometer is designed for integration within Applied Materials’ Rapid Thermal Processing equipment, and its installation is typically performed by trained AMAT service personnel to ensure proper calibration and functionality within the system. Given the high-temperature environment of RTP, the 0010-44213 is engineered for robust performance. Routine maintenance usually involves periodic checks of the optical path for any obstructions or contamination to ensure accurate readings. Calibration checks as per AMAT’s recommended schedules are also crucial.
In case of any issues, Applied Materials provides comprehensive technical support for their equipment, including the 0010-44213. This includes detailed documentation, troubleshooting guides, and access to their global network of service engineers for on-site assistance and spare parts. AMAT’s commitment to full lifecycle support ensures that users can maintain the optimal performance of their semiconductor manufacturing equipment.
