Description: The 002-3830-01 AMAT is identified as a Door Cylinder VCE SMC RBQC2007, though the listing on platforms like eBay indicates it might be associated with Brooks Automation US, LLC, rather than Applied Materials directly for this specific part number. This pneumatic cylinder is likely used for automated door mechanisms within semiconductor manufacturing equipment, providing reliable and controlled opening and closing of access panels or enclosures.
Application Scenarios: Imagine a robotic wafer handling system within an AMAT processing tool. To access the internal components for maintenance or adjustments, automated doors or panels are often employed to ensure cleanroom integrity. The 002-3830-01 AMAT (or potentially a Brooks Automation component used in AMAT equipment) could be the pneumatic cylinder responsible for the smooth and controlled opening and closing of these access doors. Reliable operation of this cylinder is crucial for efficient maintenance procedures and minimizing downtime in the semiconductor fabrication process. Any failure could impede access and delay critical servicing.
Technical Principles and Innovative Values:
- Innovation Point 1: Reliable Pneumatic Actuation: The 002-3830-01 cylinder utilizes compressed air to provide a linear force and motion, offering a reliable and cost-effective solution for automated door operation in industrial environments.
- Innovation Point 2: Compact Design: SMC’s RBQC series cylinders are often designed to be compact, allowing for integration into space-constrained areas within complex semiconductor manufacturing equipment.
- Innovation Point 3: Controlled Movement: Pneumatic cylinders allow for controlled opening and closing speeds through the regulation of air flow, ensuring smooth and safe operation of access doors.
- Innovation Point 4: Integration in Automation Systems: This type of cylinder is easily integrated with solenoid valves and control systems to automate door operation based on equipment status or maintenance requirements.
Application Cases and Industry Value: In a semiconductor cleanroom environment, maintaining air quality is paramount. Automated doors controlled by pneumatic cylinders like the 002-3830-01 (or its equivalent) ensure that access to the internal components of processing equipment is quick and minimizes the risk of contamination. For example, during scheduled maintenance on an AMAT etcher, technicians might need to access specific modules. A reliable pneumatic cylinder ensures the access door opens smoothly and seals properly upon closing, maintaining the integrity of the cleanroom environment and the functionality of the equipment. The dependable operation of this component contributes to efficient maintenance cycles and the overall uptime of critical semiconductor manufacturing tools.
