Description: The 0021-53663 AMAT is a CRITICAL INSERT, SLIT VALVE, ACP ALUM, specifically designed for 300mm wafer processing equipment manufactured by Applied Materials (AMAT). This component is a vital part of the slit valve mechanism within the process chamber. Slit valves are crucial for isolating different sections of the vacuum system, allowing for wafer transfer between chambers while maintaining the vacuum integrity of each individual chamber. The “ACP ALUM” likely refers to the material of construction, indicating Anodized Coated Aluminum, chosen for its durability and compatibility with the vacuum environment.
Application Scenarios: Consider a cluster tool in a semiconductor fabrication facility, where 300mm silicon wafers are moved sequentially through different processing chambers (e.g., etch, deposition, metrology) under vacuum. The 0021-53663 AMAT Critical Insert within a slit valve acts as a gate, opening and closing to allow the robotic arm to transfer a wafer from one chamber to the next. When closed, the slit valve ensures a tight seal, preventing cross-contamination and maintaining the specific vacuum levels required in each chamber for optimal processing. The reliable and precise operation of this slit valve insert is paramount for the efficient and contamination-free transfer of wafers, directly impacting the throughput and yield of the semiconductor manufacturing process.
Parameter
| Main Parameters | Value/Description |
|---|---|
| Product Model | 0021-53663 |
| Manufacturer | Applied Materials (AMAT) |
| Product Category | Critical Insert, Slit Valve |
| Application | 300mm Wafer Transfer in Vacuum Systems |
| Material | Anodized Coated Aluminum (ACP ALUM) |
| Size Compatibility | 300mm Wafers |
| Condition | Commonly found as new (open box) or refurbished |
| Associated Terms | Slit Valve Gate, Vacuum Isolation Valve Component |
| Function | Enables/disables wafer transfer while maintaining vacuum seal |
| Mounting | Integrated within the slit valve assembly of the chamber |
Technical Principles and Innovative Values:
- Innovation Point 1: Vacuum Integrity: The 0021-53663 AMAT is designed to create a reliable and tight vacuum seal when closed, ensuring the isolation of individual process chambers within a cluster tool, which is crucial for preventing cross-contamination and maintaining optimal processing conditions.
- Innovation Point 2: Smooth and Precise Movement: As a critical insert of the slit valve, it is engineered for smooth and precise linear movement to enable efficient and damage-free wafer transfer by the robotic handling system.
- Innovation Point 3: Durable Material: The use of Anodized Coated Aluminum provides a robust and wear-resistant surface that can withstand the repeated opening and closing cycles of the slit valve in a vacuum environment, ensuring a long operational life.
- Innovation Point 4: Compatibility with AMAT Systems: This component is specifically designed for integration within Applied Materials’ 300mm wafer processing equipment, ensuring seamless compatibility and reliable performance within their automated systems.
Application Cases and Industry Value: In a high-volume semiconductor fabrication line utilizing AMAT cluster tools for various thin film processing steps on 300mm wafers, the efficient and reliable transfer of wafers between chambers is essential for maximizing throughput. The Applied Materials 0021-53663 Critical Insert within the slit valves ensures that wafers can be moved quickly and without compromising the vacuum integrity of the individual processing chambers. This minimizes process delays and the risk of contamination, leading to higher overall equipment efficiency and increased wafer yields in the production of advanced integrated circuits.
Related Product Combination Solutions:
- Applied Materials Slit Valve Assemblies: The complete slit valve mechanisms that incorporate the 0021-53663 critical insert, including the actuator, frame, and sealing components.
- Applied Materials Vacuum Chambers (300mm): The individual processing chambers within the cluster tool that are isolated by the slit valves containing the 0021-53663 insert.
- Brooks Automation or other Wafer Handling Robots (for 300mm wafers): The robotic arms that move the wafers through the opened slit valves between the different processing chambers.
- Vacuum Pumps and Control Systems: Maintain the necessary vacuum levels within the chambers and the load lock, with the slit valves ensuring isolation during wafer transfer.
- Position Sensors for Slit Valves: Provide feedback on the open or closed status of the slit valve, ensuring proper synchronization with the robotic wafer handling system.
- Programmable Logic Controllers (PLCs): Control the sequence of operations within the cluster tool, including the opening and closing of the slit valves and the movement of the robot.
- Endpoint Detection Systems: Monitor the processing within each chamber, signaling when a wafer is ready for transfer to the next step, triggering the opening of the appropriate slit valve.
- Maintenance Kits for Slit Valves: Kits containing seals and other wear components to service and maintain the vacuum integrity of the slit valve assemblies containing the 0021-53663 insert.
Installation, Maintenance, and Full-Cycle Support: The 0021-53663 AMAT Critical Insert for the slit valve requires careful installation by trained AMAT service engineers to ensure proper alignment and vacuum sealing within the slit valve assembly. Routine maintenance involves periodic checks of the seal integrity and the smooth movement of the insert. Cleaning procedures as recommended by AMAT are crucial to prevent particle contamination and maintain vacuum performance.
In the event of wear or damage, replacement of the critical insert is necessary to ensure the proper functioning of the slit valve and the overall efficiency of the cluster tool. Applied Materials provides comprehensive technical support for their equipment, including slit valve components like the 0021-53663. This includes detailed maintenance manuals, troubleshooting guides, and access to their global network of service engineers for on-site assistance and genuine AMAT spare parts. AMAT’s commitment to full lifecycle support aims to ensure the continuous and reliable operation of their advanced semiconductor manufacturing equipment.
Contact us for assistance in sourcing reliable slit valve inserts like the 0021-53663 AMAT for your 300mm wafer processing equipment and ensuring the efficient transfer of wafers within your cluster tools.
