Product Overview
The Applied Materials 0040-91179 is a critical component within the thermal control subsystem of advanced 300mm semiconductor wafer processing equipment, particularly in etch or deposition platforms. Identified as a 300mm MCA (Multi-Contact Assembly) TXZ E-Chuck Heater, the Applied Materials 0040-91179 plays a vital role in precisely regulating the temperature of the electrostatic chuck (E-Chuck) that holds the silicon wafer during processing. Consistent and uniform wafer temperature is paramount for achieving repeatable and high-quality results in critical semiconductor fabrication steps. The Applied Materials 0040-91179 is engineered for high reliability and precise thermal control in the demanding environment of semiconductor manufacturing, contributing significantly to process stability and yield optimization. As a key element in the automation architecture, the Applied Materials 0040-91179 underscores Applied Materials’ commitment to providing sophisticated thermal management solutions for the semiconductor industry.
The precise temperature control offered by the Applied Materials 0040-91179 is essential for ensuring uniformity and repeatability across the wafer surface during plasma etching or thin film deposition processes. The E-Chuck, equipped with the 0040-91179 heater, ensures intimate thermal contact with the wafer, allowing for rapid and accurate temperature adjustments as required by the process recipe. This capability is crucial for achieving the desired film properties and critical dimensions in advanced semiconductor devices. The robust design of the Applied Materials 0040-91179 minimizes thermal gradients and ensures consistent heating across the wafer, contributing to improved device performance and manufacturing efficiency. The reliability and accuracy of the Applied Materials 0040-91179 are therefore indispensable for maximizing throughput and minimizing defects in high-volume semiconductor production.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | 0040-91179 |
| Manufacturer | Applied Materials |
| Product Type | E-Chuck Heater Assembly |
| Application | 300mm Semiconductor Wafer Processing Equipment |
| Component Type | Resistive Heater with Integrated Sensors (Likely) |
| Heater Type | TXZ (Specific heater technology, details in datasheet) |
| Chuck Compatibility | MCA (Multi-Contact Assembly) E-Chuck |
| Wafer Size Compatibility | 300mm |
| Temperature Control Accuracy | (Specific value would be in the full datasheet) |
| Operating Temperature Range | (Specific value would be in the full datasheet) |
| Electrical Specifications | (Voltage, Current, Power rating in full datasheet) |
| Interface | Electrical connectors for power and sensor feedback |
| Material | (Likely ceramic or high-temperature alloy) |
Main Features and Advantages
The Applied Materials 0040-91179 300mm MCA TXZ E-Chuck Heater is engineered for precise and uniform temperature control of silicon wafers during critical semiconductor manufacturing processes. Its primary feature is the ability to rapidly and accurately adjust the wafer temperature, ensuring optimal conditions for etching or deposition. The integrated design of the 0040-91179 likely includes temperature sensors that provide real-time feedback to the system’s thermal control unit, enabling closed-loop control and exceptional temperature stability across the wafer surface. This precise thermal management is crucial for achieving high process repeatability and uniformity, directly impacting the quality and yield of semiconductor devices.
Uniform Heating: A key advantage of the Applied Materials 0040-91179 is its ability to provide highly uniform heating across the entire 300mm wafer. This uniformity minimizes thermal stress on the wafer and ensures consistent process results regardless of the wafer’s radial position. The specialized TXZ heater technology employed in the 0040-91179 is likely optimized for even heat distribution, contributing to improved device performance and reliability.
Rapid Thermal Response: The Applied Materials 0040-91179 is designed for rapid heating and cooling cycles, allowing for fast transitions between different process steps. This quick thermal response time improves overall process efficiency and throughput, reducing cycle times and increasing the number of wafers processed per unit time. The efficient thermal transfer of the 0040-91179 contributes to the overall productivity of the semiconductor manufacturing equipment.
Integration with MCA E-Chuck: Specifically designed for compatibility with Multi-Contact Assembly (MCA) electrostatic chucks, the Applied Materials 0040-91179 ensures optimal thermal contact and efficient heat transfer to the wafer. The MCA design provides a reliable and uniform electrical and mechanical interface, which is essential for consistent thermal performance. This integration simplifies installation and ensures seamless operation within the Applied Materials processing platform.
Application Field
The Applied Materials 0040-91179 300mm MCA TXZ E-Chuck Heater is a critical component in the semiconductor manufacturing industry, specifically within advanced 300mm wafer processing equipment. It finds primary application in plasma etching and thin film deposition systems, where precise control of wafer temperature is essential for achieving the desired film characteristics and etching profiles. The Applied Materials 0040-91179 ensures that the silicon wafer is maintained at the optimal temperature throughout the process, contributing directly to the quality and uniformity of the fabricated semiconductor devices.
In semiconductor fabrication facilities, the Applied Materials 0040-91179 is an integral part of the wafer handling and processing automation. Its reliable and accurate thermal control capabilities are crucial for meeting the stringent requirements of advanced semiconductor manufacturing processes. The Applied Materials 0040-91179 plays a vital role in ensuring process repeatability, minimizing defects, and maximizing yields in high-volume production environments. Its compatibility with 300mm wafer technology makes it essential for the production of cutting-edge semiconductor devices.
Related Products
Within the Applied Materials product line, the 0040-91179 300mm MCA TXZ E-Chuck Heater is closely related to other components involved in wafer handling and thermal management. These may include:
- Electrostatic Chuck (E-Chuck) Assemblies: The mechanical and electrical components that hold the wafer and to which the heater is attached.
- Temperature Control Units (TCUs): Systems that provide precise power control and monitor temperature feedback from the heater.
- Wafer Cooling Systems: Components that work in conjunction with the heater to rapidly change wafer temperature.
- RF Match Networks: Components used in plasma processing that can influence wafer temperature.
- Process Chamber Liners: Materials within the processing chamber that affect heat transfer.
- Various Temperature Sensors: Thermocouples or other sensors used to monitor wafer and E-Chuck temperature.
- Power Delivery Systems: Components that supply the necessary electrical power to the heater.
- Other Heater Configurations: Different heater designs for various wafer sizes or process requirements.
Installation and Maintenance
Pre-installation preparation: Before installing the Applied Materials 0040-91179 300mm MCA TXZ E-Chuck Heater, ensure that the E-Chuck assembly is clean and free of any contaminants. Verify that the electrical connections are properly prepared according to the Applied Materials equipment manual. Inspect the 0040-91179 for any signs of damage during shipping or handling. Ensure that the mating surfaces between the heater and the E-Chuck are clean and smooth to ensure proper thermal contact. Refer to the specific Applied Materials equipment documentation for detailed pre-installation instructions and safety precautions relevant to the 0040-91179.
Maintenance recommendations: Regular maintenance is essential for the long-term performance and reliability of the Applied Materials 0040-91179. Follow the preventative maintenance schedule outlined in the equipment manual. Periodically inspect the heater for any signs of damage or degradation. Ensure that the electrical connections are secure and free from corrosion. Monitor the temperature control performance of the system to detect any deviations from the expected behavior. Clean the external surfaces of the heater and E-Chuck assembly with approved cleanroom-compatible cleaning solutions. Any unusual temperature readings or control issues should be investigated promptly by qualified maintenance personnel. Replacing the 0040-91179 according to the recommended service intervals can help prevent unexpected downtime.
