4104C ZYGO

Detailed Parameter Table

Parameter Name	Parameter Value
Product Model	4104C
Manufacturer	ZYGO Corporation
Product Category	Measurement Electronics (for Displacement Measuring Interferometers)
Number of Axes/Board	1 or 2 (often configured for 2)
Board Type	6U VME64x
Position Resolution	0.31 nm (for double-pass interferometers)
Max. Velocity	±2.1 m/s (for double-pass interferometers)
Accuracy at Max Velocity (σ)	0.5 nm (for double-pass interferometers)
Minimum Optical Power	1.9 µW
Compatible Lasers	ZYGO 7702, 7714, 7724 Series
Communication Protocol	VME bus, can output position via BiSS/SPI
Environmental Requirements	Designed for industrial/laboratory use, often integrated into climate-controlled systems

Product Introduction

The ZYGO 4104C is a highly specialized piece of measurement electronics, serving as a critical component within ZYGO’s renowned displacement measuring interferometer (DMI) systems. As a core element of precision metrology, the ZYGO 4104C is designed to interface with ZYGO laser heads and interferometers, converting optical signals into highly accurate displacement measurements. This sophisticated board is specifically engineered for applications demanding sub-nanometer resolution and high-speed position tracking, positioning the ZYGO 4104C as an indispensable tool in advanced manufacturing and scientific research.

Integrated as a 6U VME64x board, the ZYGO 4104C provides the necessary processing power and connectivity to enable real-time, precise displacement feedback. It forms the backbone of ZYGO’s displacement measuring systems, providing the critical link between the optical interferometer and the control system. The technical positioning of the ZYGO 4104C is at the forefront of high-precision length and position measurement, crucial for industries where even minute variations can impact product quality or experimental results. Its role and value in automation systems lie in its ability to deliver ultra-accurate positional data, which is then utilized for closed-loop feedback in motion control, lithography, and various other high-precision alignment and measurement tasks. The ZYGO 4104C ensures that movements are executed with extreme precision, driving the performance of the most demanding applications.

Core Advantages and Technical Highlights

The ZYGO 4104C measurement electronics unit stands out in the realm of ultra-precision metrology due to several core advantages and technical highlights that define its superior performance and versatility.

Performance: The paramount advantage of the ZYGO 4104C is its exceptional measurement resolution and speed. Capable of achieving a position resolution of 0.31 nm and supporting velocities up to ±2.1 m/s for double-pass interferometers, the ZYGO 4104C provides real-time, highly accurate displacement data. This makes it suitable for dynamic applications requiring rapid and precise positional feedback, far exceeding the capabilities of traditional sensors. This high fidelity ensures that critical processes, such as wafer positioning in semiconductor manufacturing, are executed with unparalleled accuracy.

Reliability and Stability: Engineered by ZYGO, a leader in laser interferometry, the ZYGO 4104C is built with robust design principles to ensure long-term stability and reliability in demanding industrial and laboratory environments. Its integration into VME bus systems ensures a stable and proven communication backbone, minimizing data integrity issues. The careful design accounts for the needs of continuous operation in high-stakes applications, offering sustained performance over extended periods.

Compatibility and Integration: The ZYGO 4104C boasts excellent compatibility within the ZYGO DMI ecosystem. It is designed to work seamlessly with various ZYGO laser heads and interferometer optics, including the 7702, 7714, and 7724 series lasers. Its 6U VME64x board format facilitates straightforward integration into existing VME-based control architectures, and its ability to output position signals via BiSS or SPI interfaces ensures broad compatibility with a wide range of industrial controllers and PCs. This modularity allows the ZYGO 4104C to be a flexible component in complex, multi-axis motion systems.

Precision with External Sensors: A notable technical highlight of the ZYGO 4104C is its capability to work with external interferometers, allowing the measurement mirror to be attached directly to the point of interest for positioning. This direct measurement significantly reduces errors that can arise from mechanical and thermal influences between an internal sensor and the actual point of motion, leading to intrinsically higher accuracy. This feature of the ZYGO 4104C is critical for applications where environmental factors and mechanical play must be meticulously accounted for.

Typical Application Scenarios

The ZYGO 4104C measurement electronics are foundational to high-precision metrology, finding critical applications in industries where nanometer-level accuracy and repeatability are non-negotiable. Its robust performance and precise data acquisition capabilities make it indispensable in several demanding fields.

In the semiconductor industry, the ZYGO 4104C is extensively used in lithography equipment, wafer inspection systems, and mask alignment stages. The extreme precision required for manufacturing microchips necessitates ultra-fine positioning, which the ZYGO 4104C provides by converting interferometer signals into exact positional feedback. This ensures that the intricate patterns on silicon wafers are aligned and exposed with incredible accuracy, directly impacting chip performance and yield. For instance, in a steppers or scanners, the ZYGO 4104C contributes to the precise movement of the reticle and wafer stages, crucial for multi-layer patterning.

The aerospace and defense sectors also heavily rely on the ZYGO 4104C for applications such as precision machining of optical components, assembly of satellite systems, and calibration of high-fidelity sensors. The manufacturing of highly precise mirrors for telescopes or intricate components for guidance systems demands dimensional control that only advanced metrology, powered by units like the ZYGO 4104C, can provide. Its high-speed data acquisition is vital for dynamic testing of aerospace components, ensuring structural integrity and performance under operational conditions.

In advanced research and development, particularly in nanotechnology and materials science, the ZYGO 4104C is integral to experimental setups requiring atomic-scale manipulation and characterization. It supports applications like atomic force microscopy (AFM) stage positioning, where precise control over tip movement is crucial for imaging surfaces at the nanoscale. Furthermore, in precision manufacturing beyond semiconductors, such as the production of hard disk drives, medical devices, and high-performance optics, the ZYGO 4104C ensures that critical dimensions are met, contributing to product reliability and quality. The unparalleled accuracy delivered by the ZYGO 4104C allows manufacturers to push the boundaries of miniaturization and precision.

Related Model Recommendations

The ZYGO 4104C is a specific measurement electronics board within ZYGO’s broader portfolio of displacement measuring interferometers and related components. Here are some related models that often work in conjunction with or represent alternatives/upgrades to the ZYGO 4104C:

ZYGO ZMI 4004: This is an earlier generation of ZMI measurement electronics, providing similar functionality to the ZYGO 4104C but potentially with different specifications in terms of resolution, velocity, or axis count.
ZYGO ZMI Go!: A complete and compact measurement electronics solution designed for displacement measuring interferometers, supporting up to 4 measurement channels and offering easy interfacing with standard motion control systems. It is a more modern, integrated solution compared to the board-level ZYGO 4104C.
ZYGO 7702 Laser: A common laser head model compatible with the ZYGO 4104C, providing the coherent light source necessary for interferometer operation.
ZYGO 7714 Laser: Another compatible laser head that works with the ZYGO 4104C, often selected based on specific application requirements for wavelength or power.
ZYGO 7724 Laser: A higher-performance laser typically paired with ZYGO’s advanced measurement electronics, including the ZYGO 4104C, for the most demanding metrology applications.
ZYGO ZMI-7705 Laser: An earlier laser model sometimes associated with ZMI systems, offering similar functionality to newer ZYGO lasers but with potentially different specifications.
ZYGO MARK GPI-XPS: While not directly a measurement electronics board, this interferometer interface controller is a ZYGO product that could be part of a larger system that integrates displacement measuring components like those supported by the ZYGO 4104C.
VME chassis/backplane: The ZYGO 4104C is a 6U VME64x board, meaning it requires a compatible VME chassis and backplane for installation and communication, forming the essential physical and electrical environment for the module.