Product Description for VAT 65040-PACV-AYU2

Description: The 65040-PACV-AYU2 is a Pendulum Control & Isolation Gate Valve from VAT, a leading manufacturer of high-end vacuum components. This specialized valve is designed for use in semiconductor and other high-vacuum process applications, where precise control of pressure and gas flow is critical.

Application Scenarios: In a semiconductor fabrication plant, a thin-film deposition chamber requires a high degree of vacuum stability and precise pressure control to ensure the quality and uniformity of the deposited layers. An older system was struggling with downstream pressure control, leading to inconsistent film thickness and high product rejection rates. By integrating the VAT 65040-PACV-AYU2 pendulum valve into the system, the manufacturer achieved a breakthrough. The valve’s stepper motor actuator and fine-tuned motion profile provided exceptionally smooth and reproducible pressure control, eliminating the pulsations and instability of the previous system. This allowed for much tighter process control, resulting in a significant reduction in defects and a remarkable increase in yield. The 65040-PACV-AYU2‘s role in enabling such precision made it a cornerstone of the improved production process.

Parameter:

Main Parameters Value/Description Product Model: 65040-PACV-AYU2 Manufacturer: VAT Product Category: Pendulum Control & Isolation Gate Valve Inside Diameter: 100 mm (4″), providing a large flow path for high conductance. Flange Type: ISO-F (compatible with ISO 1609 Fig. 1), for standard vacuum system integration. Body Material: Aluminum, chosen for its excellent vacuum compatibility and low weight. Actuator: Stepper motor, enabling precise and finely controlled movements. Pressure Range: 1e-8 mbar to 1.2 bar (abs), suitable for high vacuum to atmospheric conditions. Maximum Differential Pressure (closed): 1.2 bar, highlighting the valve’s robust sealing capability. Max. Pressure on Seat During Opening: 0.03 bar, a critical parameter for safe and smooth operation. Molecular Flow Conductance: 1700 l/s, ensuring efficient gas flow and rapid pump-down times. Valve Body Temperature (max.): 120°C, suitable for baking out the vacuum system to remove contaminants.

Technical Principles and Innovative Values:

• Innovation Point 1: Stepper Motor Actuation with Motion Profiling: The 65040-PACV-AYU2 utilizes a stepper motor actuator to control the position of the pendulum gate with exceptional precision. This is a significant advantage over simple pneumatic actuators, as it allows for the implementation of finely tuned motion profiles. This means the valve’s opening and closing speed can be precisely controlled and slowed down just before closing, eliminating the “hitting” effect and minimizing particle generation and mechanical stress.
• Innovation Point 2: High Conductance for Process Efficiency: With a high molecular flow conductance of 1700 l/s, the 65040-PACV-AYU2 ensures a minimal pressure drop across the valve in the open position. This is critical for high-throughput vacuum processes, as it allows for faster pump-down times and more efficient gas flow, directly contributing to increased production efficiency and lower operational costs.
• Innovation Point 3: Robust Design for Harsh Environments: The valve is built from high-quality aluminum and is designed to operate reliably under the demanding conditions of semiconductor manufacturing, which can involve corrosive gases and high temperatures. Its robust sealing and mechanical design ensure a low leak rate and a long service life, even with frequent cycling.

Application Cases and Industry Value:

In the manufacturing of OLED displays, the thin-film encapsulation process is extremely sensitive to pressure fluctuations. A leading display manufacturer was experiencing challenges with a standard throttle valve, which could not provide the stability and repeatability required. They installed the VAT 65040-PACV-AYU2 to manage the vacuum in their process chambers. The valve’s ability to maintain a perfectly stable pressure during the encapsulation process resulted in a noticeable improvement in display quality, with fewer mura defects and a higher number of perfect pixels. This enhanced precision allowed the manufacturer to push the boundaries of their process technology, delivering a superior product and solidifying their position in the competitive display market.

Related Product Combination Solutions:

The VAT 65040-PACV-AYU2 is a specialized component that is part of a larger vacuum system. It works in concert with:

• VAT Series 650 Valves: Other valves in the Series 650 family, such as those with different flange sizes or actuators, can be combined with the 65040-PACV-AYU2 to build a comprehensive vacuum system.
• VAT Gate Valves: For isolation applications where precise control is not needed, a VAT Gate Valve can be used in tandem with the 65040-PACV-AYU2 to separate the process chamber from the vacuum pump.
• VAT Vacuum Controllers: A dedicated vacuum controller is essential to receive feedback from pressure gauges and send precise control signals to the 65040-PACV-AYU2‘s stepper motor actuator, enabling automated pressure regulation.
• Vacuum Pumps (Turbo, Dry, etc.): The 65040-PACV-AYU2 is the crucial interface between the process chamber and the vacuum pumps (e.g., a turbomolecular pump for high vacuum and a dry pump for roughing), ensuring efficient evacuation and pressure management.
• Vacuum Gauges: To provide the feedback necessary for the 65040-PACV-AYU2‘s control, various vacuum gauges are used to measure the pressure within the chamber, with different types covering the full range from atmospheric to high vacuum.

Installation, Maintenance, and Full-Cycle Support:

The VAT 65040-PACV-AYU2 is designed for professional installation within a high-vacuum system. Its ISO-F flange allows for secure and leak-tight connections. Maintenance is simplified by VAT’s design, often allowing for service and seal replacement without completely removing the valve from the system. The valve’s robust construction and high-quality seals contribute to an extended service life, with its typical cycles until first service reaching well over 100,000.

While this is a highly specialized and often legacy product, our expertise extends to its full lifecycle support. We can provide guidance on installation, troubleshooting, and maintenance, and we maintain a global network for sourcing high-quality spare parts and refurbished units. Our commitment is to ensure that your critical high-vacuum processes continue to operate with the precision and reliability that the 65040-PACV-AYU2 was designed to provide.

Contact us for a customized solution and to learn how the 65040-PACV-AYU2 can enhance your industrial automation system.