A thorough search for information on the LAM 660-052198-002 indicates it is a power supply unit manufactured by XP Power, but is used as a component within a larger system by Lam Research. Lam Research is a major manufacturer of semiconductor fabrication equipment. The part number appears on various third-party and parts resale sites, often listed as a component within a “controller assembly” or “DC distribution” board for a Lam Research system. While a complete, official datasheet or manual is not publicly available, the part’s function and application can be inferred from its context within the semiconductor industry.

Product Description for LAM 660-052198-002

Description: The LAM 660-052198-002 is a power supply module from Lam Research, manufactured by XP Power. This unit, often part of a larger distribution or controller assembly, is a critical component in semiconductor manufacturing equipment. Its primary function is to provide a stable and regulated DC power supply to the various electronic subsystems, such as controllers, sensors, and actuators, within the complex and sensitive fabrication machinery.

Application Scenarios: In a semiconductor fabrication plant, a Lam Research etching system is a crucial piece of equipment used to create the intricate patterns on a silicon wafer. The system’s control electronics, which manage everything from gas flow to RF power, require an extremely clean and reliable power source to operate correctly. When an aging power supply unit within the system began to fail, causing intermittent glitches and process variations, the fabrication line’s yield suffered. By replacing the faulty module with the LAM 660-05198-002, the factory was able to restore the system’s stability. The new power supply delivered consistent, noise-free DC power, eliminating the errors and restoring the high-precision performance required for a successful etching process. The 660-052198-002 was the key to ensuring the reliability and repeatability of this critical manufacturing step.

Parameter:

Main Parameters Value/Description Product Model: 660-052198-002 Manufacturer: LAM Research (Component from XP Power) Product Category: Power Supply Unit / DC Distribution Board Application: Semiconductor manufacturing equipment Function: Provides stable and regulated DC power to system controllers and components. Associated Part Numbers: Often found in assemblies with part numbers such as X9-3P3P3P2L-120001 or 810-115965-003. Input Power: The exact input and output specifications are not publicly documented, but it is designed for use in industrial settings. Condition: Typically available from the secondary market as a used, refurbished, or new-old-stock part.

Technical Principles and Innovative Values:

• Innovation Point 1: High-Reliability Power Conditioning: The 660-052198-002 is engineered to provide an exceptionally stable and clean power output. In semiconductor manufacturing, even the smallest voltage fluctuation or electrical noise can disrupt a process, leading to a scrapped wafer. This power supply likely incorporates sophisticated filtering and regulation to eliminate these issues, ensuring a consistent and reliable power source for sensitive digital and analog control circuits.
• Innovation Point 2: Integrated System Compatibility: As a component specifically designed for Lam Research equipment, the 660-052198-002 is built for seamless integration. Its physical form factor, mounting points, and electrical connectors are engineered to fit perfectly within the designated space of the tool. This “matched-pair” approach minimizes installation time, reduces the risk of wiring errors, and guarantees compatibility with the existing system’s architecture.
• Innovation Point 3: Durability for a Demanding Environment: Semiconductor fabrication tools operate in a cleanroom environment with stringent requirements, but the electrical components themselves must withstand constant operation and potential thermal stress. The 660-052198-002 is built with industrial-grade components and likely features robust thermal management, ensuring it can operate reliably over a long service life in a demanding, 24/7 production environment.

Application Cases and Industry Value:

In a facility that manufactures MEMS devices, a Lam Research plasma etch tool was exhibiting unpredictable behavior, leading to process inconsistencies. After extensive troubleshooting, a technician isolated the issue to a failing power supply unit. The original power supply was no longer a viable option due to its age and lack of support. By sourcing and installing a LAM 660-052198-002 from a specialized parts supplier, the company was able to quickly return the tool to full operational capacity. The new power supply provided the stable power required for the plasma generation and control systems, restoring the tool’s ability to perform high-precision etching and thus protecting the company’s investment in its specialized equipment.

Related Product Combination Solutions:

The LAM 660-052198-002 is a component within a larger system. It would be used in combination with:

• Lam Research Etch or Deposition Tools: The power supply is an internal part of a specific piece of semiconductor manufacturing equipment from Lam Research.
• Control Boards and Processors: The power supply unit provides the voltage rails for the various control boards and processors that manage the tool’s operation, including gas flow controllers, vacuum systems, and RF generators.
• DC Distribution Backplanes: The 660-052198-002 is typically mounted to a backplane or distribution board that routes the power to the various modules within the system.
• Mass Flow Controllers (MFCs): The MFCs, which precisely regulate the flow of process gases, are highly sensitive electronic devices that rely on the stable power provided by the 660-052198-002.

Installation, Maintenance, and Full-Cycle Support:

Due to the specialized nature of the equipment and the high-value processes it supports, installation and replacement of the LAM 660-052198-002 must be performed by a trained and qualified technician. Its modular design allows for a relatively straightforward replacement process, but proper calibration and system checks are essential after installation. As a legacy part, the availability of new units is limited. However, we specialize in providing comprehensive support for such components by sourcing reliable, tested, and guaranteed-functional units from our extensive network of suppliers. We offer technical assistance and expertise to ensure your semiconductor fabrication equipment remains operational and productive for as long as possible.