Description
The 65040-PACV-AYU2 (VAT) is a precision pendulum control & isolation gate valve manufactured by VAT Vakuumventile AG, categorized as a vacuum control valve / isolation module. It is engineered for fine control in vacuum systems, combining a throttling (control) function with full isolation capability.
As a pendulum-style valve, 65040-PACV-AYU2 supports highly accurate modulation of gas flow/conductance and reliably seals off vacuum lines when required, making it suitable for demanding semiconductor, vacuum processing, or coating systems.
Application Scenarios
In advanced semiconductor fabrication, maintaining stable chamber pressure during etch or deposition steps is critical. A tool integrator once faced pressure oscillations when multiple gas species were injected; by deploying 65040-PACV-AYU2 as the pressure-control gate valve in the throttle line, they achieved tight loop stability (±0.1 mTorr) and rapid response under changing gas loads.
In another case, a high-throughput thin-film coating system used 65040-PACV-AYU2 to isolate the chamber during maintenance cycles, minimizing contamination and vacuum loss. The dual function (control + isolation) reduces the need for separate shut-off valves, optimizing footprint and simplifying system architecture.
Parameter
Here is a typical (or speculated based on manufacturer and analogous models) parameter set for 65040-PACV-AYU2:
| Parameter | Value / Description |
|---|---|
| Product Model | 65040-PACV-AYU2 |
| Manufacturer | VAT Vakuumventile AG |
| Product Category | Pendulum control / isolation gate valve |
| Control Element | Throttling plate (pendulum) modulated by stepper motor |
| Actuation / Drive | Stepper motor with encoder feedback, pneumatic lift for isolation |
| Communication Interface | RS-232, analog outputs (2 channels) for status / feedback |
| Control Algorithm | PID (adaptive, upstream/downstream, soft-pump) |
| Environmental / Vacuum Range | Suitable for vacuum and low-pressure operation (e.g. in vacuum chambers) |
| Sealing Mechanism | Spring-loaded sealing ring for leak-tight isolation |
| Dimensions / Flange Options | Custom flanges (e.g. DN up to ~400 mm), optional heaters up to 120 °C |
| Operating Temperature | Typically ambient to ~120 °C (higher on request) |
Application Cases and Industry Value
Case 1: Semiconductor Etch Tool Pressure Loop
A Fab integrator installed VAT 65040-PACV-AYU2 in the throttle line of an etch chamber. Before installation, the chamber pressure would drift during dynamic gas switching. After, loop tuning showed a 40 % faster settling time and > 50 % reduction in overshoot. The integrator reported fewer tool shutdowns due to pressure anomalies and increased throughput.
Case 2: Vacuum Coating / PVD System
In a PVD (physical vapor deposition) system, VAT 65040-PACV-AYU2 served as the isolation gate during maintenance and as the throttle control during deposition. The dual role allowed the system designers to eliminate an extra isolation valve, saving cost, space, and leak points. Users remarked on the ease of alignment and reliability during repeated cycles over months of operation.
In both cases, VAT 65040-PACV-AYU2 contributed to heightened automation, reduced maintenance downtime, more stable processes, and lower total cost of ownership.
Related Product Combination Solutions
Here are 5 to 7 related VAT models and modules that can synergize with 65040-PACV-AYU2:
-
65040-PACV-BUJ2 – A sibling pendulum valve variant, which may share actuator/mounting compatibility.
-
65046-PA52-AIW2 – A larger-size pendulum control + isolation valve in the same series, ideal for higher throughput lines.
-
65044-PAGP-APF2 – A midline pendulum valve, useful if you need multiple stages of control or backup in the same system.
-
65040-PA52-ALV1 – A simpler isolation valve variant that can be paired as a backup or redundant path.
-
65048-JH52-AKF1 – A variant designed for different flange or pressure ranges.
-
Valve heater / insulation module (option for base valve) – Useful when processing at elevated temperatures.
-
Remote control / diagnostic interface unit – For integration of RS-232 or analog remote monitoring, complementing the built-in feedback of 65040-PACV-AYU2.
These combinations allow system designers to scale capacity, provide redundancy, or adapt to different vacuum chamber interfaces, all while maintaining compatibility of control and feedback strategies across the valve family.
Installation, Maintenance, and Full-Cycle Support
During installation and commissioning, 65040-PACV-AYU2 is shipped with calibration instructions and the LEARN routine should be run once at startup to characterize the gas behavior and valve response. Because the valve integrates control and isolation, cabling and piping are simplified, and fewer external components are required.
Routine maintenance is straightforward: the modular actuator and encoder assemblies are accessible, and periodic checks of sealing ring integrity or lubrication (if applicable) suffice. Should any fault occur (e.g. stepper motor stall, encoder mismatch, seal leakage), the valve’s diagnostic feedback (error flags, position error bits) assists in rapid troubleshooting. The actuator and sensor modules are replaceable in modular fashion, reducing downtime.
VAT typically offers global technical support, calibration services, spare seal kits, and refurbishment programs. For critical systems, they may provide on-site engineers or rapid replacement programs. The integration of diagnostics and self-learning control further reduces field tuning needs and accelerates fault recovery.
Brad Harrison TDN-8CO-108 Multi-Port System 2 Pcs
BRAD HARRISON CC4030A48M200 4P POWER QC M/F/ST 20M NEW
BRAD HARRISON 409P606-35 MPIS CABLE 409P60635 NEW
BRAD HARRISON CC4030A54M120 USPP CC4030A54M120
BRAD HARRISON SDS 8000 PASSIVE MPIS MINI 8-JUNCTION NEW
BRAD HARRISON 302000C03M120 NSPP 302000C03M120
BRAD HARRISON 302000C03M120 USPP 302000C03M120
BRAD HARRISON 47554 NSFP 47554
Brad Harrison #43321 4 Wire Saftey Receptacle (N) 5/4/1
BRAD HARRISON 4100C9W NSFP 4100C9W
BRAD HARRISON CC4030A47M310 USPP CC4030A47M310
BRAD HARRISON 409P606-35 MPIS CABLE 409P60635
BRAD HARRISON 47491 NSFP 47491
BRAD HARRISON DN11AM600 NSFP DN11AM600
BRAD HARRISON CC4030A47M050 NSFP CC4030A47M050
BRAD HARRISON 114030K12M380 4P MINI M/ST F/ST 38M NEW
BRAD HARRISON 712P801 MULTIPORT INTERCONNECT SYSTEM NIB
NIB BRAD HARRISON 712P601 MULTI-PORT SYSTEM
Expedited shipping available
NEW BRAD HARRISON 14030K12M380 CABLE ASSEMBLY 38M
Expedited shipping available
