Product Overview
The MKS Instruments ASTeX AX8403A is a precision-engineered ozone generator module from the SEMOZON® AX8400 series, optimized for delivering high-purity ozone in semiconductor manufacturing and advanced thin-film processing applications. As a core component in Applied Materials systems, bearing the AMAT part number 0190-36233, the MKS Instruments ASTeX AX8403A utilizes dielectric barrier discharge technology to convert oxygen feedstocks into stable ozone concentrations, supporting critical processes like photoresist ashing, surface cleaning, and oxidation enhancement. This module’s core functions encompass adjustable ozone output up to 1000 g/h, with integrated flow control and safety interlocks to ensure consistent delivery under varying operational demands. Positioned as a reliable workhorse within MKS’s plasma and gas abatement ecosystem, the MKS Instruments ASTeX AX8403A provides immense value by enabling defect-free wafer fabrication, reducing chemical waste, and accelerating throughput in high-volume production lines.
In semiconductor fabrication facilities, the MKS Instruments ASTeX AX8403A integrates seamlessly into cluster tools and etch stations, where its robust construction handles the rigors of cleanroom environments while maintaining ozone purity above 99%. This positioning allows for scalable deployment across 200mm to 300mm wafer platforms, with minimal maintenance intervals that align with fab schedules. By incorporating real-time concentration monitoring, it mitigates variability in downstream reactions, safeguarding yield rates and process repeatability essential for logic and memory device yields.
The MKS Instruments ASTeX AX8403A ultimately elevates industrial automation by transforming ozone generation into a predictable, eco-efficient process. Its emphasis on safety and longevity—through features like overcurrent protection and leak detection—delivers long-term cost savings, empowering engineers to focus on innovation rather than upkeep, and reinforcing MKS’s legacy in precision gas solutions for next-generation manufacturing.
Technical Specifications
| Product Model | AX8403A |
|---|---|
| Manufacturer | MKS Instruments (ASTeX) |
| Product Type | Ozone Generator Module |
| Series | SEMOZON® AX8400 |
| Ozone Output | Up to 1000 g/h (adjustable) |
| Feed Gas | Oxygen (O2) or air |
| Concentration Range | 1-20% by weight |
| Power Supply | 208-240 VAC, 50/60 Hz, single-phase |
| Power Consumption | < 5 kW |
| Operating Temperature | 5°C to 40°C |
| Humidity | 0-90% non-condensing |
| Dimensions | 48 cm x 30 cm x 20 cm (approximate) |
| Weight | 15 kg |
| Gas Connections | 1/4-inch compression fittings |
| Safety Features | Overpressure relief, interlocks, leak sensors |
| Certifications | CE, SEMI S2 compliant |
Main Features and Advantages
The MKS Instruments ASTeX AX8403A harnesses advanced corona discharge electrodes to produce ozone with exceptional uniformity, achieving concentrations tunable from 1% to 20% by weight, which ensures optimal reactivity for plasma-enhanced cleaning without excessive byproduct formation. This precision minimizes substrate damage in photoresist stripping, offering a marked improvement over wet chemical alternatives by slashing hazardous waste generation by up to 70%.
Integrated diagnostics and control: Equipped with embedded sensors for real-time ozone monitoring and flow verification, the MKS Instruments ASTeX AX8403A interfaces via RS-232 or analog signals to host controllers, allowing proactive adjustments that maintain setpoint accuracy within ±2%. This capability extends to fault diagnostics displayed on an optional LCD panel, alerting operators to electrode wear or gas purity deviations before impacting production runs.
Environmental and safety robustness: Designed for cleanroom compliance, the MKS Instruments ASTeX AX8403A features a sealed enclosure with NEMA 12 rating, resisting particle ingress and corrosive vapors common in fab exhausts. Its automatic shutdown sequences on detected leaks or power anomalies comply with SEMI S2 standards, enhancing personnel safety while extending module lifespan beyond 10,000 hours of operation.
Compact modularity for scalability: With a footprint under 0.3 m², the MKS Instruments ASTeX AX8403A mounts effortlessly into tool skids or abatement units, supporting parallel configurations for high-throughput lines. Low power draw and oxygen-efficient design reduce utility costs, while easy-access filters simplify quarterly servicing without tool downtime.
The MKS Instruments ASTeX AX8403A‘s competitive strength resides in its synergy of reliability and adaptability—delivering lab-grade ozone purity in industrial volumes at a fraction of cryogenic system expenses. This empowers fabs to streamline oxidation steps, boost etch selectivity, and meet sustainability targets, positioning it as a pivotal enabler for scaling advanced nodes in semiconductor automation.
Application Field
In semiconductor wafer fabrication, the MKS Instruments ASTeX AX8403A powers downstream plasma ashing chambers for post-etch residue removal, where its high-concentration output accelerates strip rates on patterned dielectrics without undercutting sensitive features. This addresses challenges in 3D NAND processing, ensuring void-free cleaning that preserves critical dimensions and elevates yield in multi-layer stacking operations.
Thin-film deposition suites utilize the MKS Instruments ASTeX AX8403A for surface activation prior to ALD cycles, injecting ozone to hydroxylate substrates and enhance precursor adhesion on high-k materials. By resolving nucleation inconsistencies in gate stack formation, it mitigates defects like pinholes, supporting reliable transistor performance in FinFET architectures amid aggressive scaling.
Photovoltaic manufacturing deploys the MKS Instruments ASTeX AX8403A in texturing lines for silicon solar cells, where controlled ozonation etches pyramidal surfaces to optimize light trapping without chemical over-etching. This targeted application counters variability in polycrystalline wafers, improving quantum efficiency and reducing recombination losses for cost-competitive module production.
Advanced packaging facilities integrate the MKS Instruments ASTeX AX8403A into underfill preparation stations, using low-concentration modes to desmear vias in fan-out wafers, preventing void entrapment during encapsulation. It tackles adhesion failures in heterogeneous integration, facilitating higher interconnect densities for AI chiplets and 5G modules.
Across these domains, the MKS Instruments ASTeX AX8403A resolves precision gas delivery hurdles—from concentration stability in vacuum tools to eco-friendly abatement—driving defect reduction, energy savings, and faster time-to-market in precision manufacturing ecosystems.
Related Products
- AX8407A: Variant in the SEMOZON AX8400 series with enhanced output up to 1500 g/h, serving as a higher-capacity upgrade from the MKS Instruments ASTeX AX8403A for ultra-high-volume fabs requiring faster cycle times.
- AX8400: Base model ozone generator offering similar technology to the MKS Instruments ASTeX AX8403A but with modular electrode stacks, ideal for custom flow rates in R&D pilot lines.
- SEMOZON AX7610: Remote plasma source complementing the MKS Instruments ASTeX AX8403A by providing oxygen radicals for synergistic cleaning in hybrid gas-plasma processes.
- 0190-17159: Applied Materials-specific counterpart to the MKS Instruments ASTeX AX8403A, optimized for Producer platforms with integrated AMAT diagnostics for seamless tool integration.
- AX8200A: Compact downstream source pairing with the MKS Instruments ASTeX AX8403A for combined ozone-microwave activation in edge bevel cleaning applications.
- SEMOZON AX8405: High-purity variant with nitrogen-compatible feeds, positioned as an alternative to the MKS Instruments ASTeX AX8403A for air-based ozonation in cost-sensitive setups.
- MKS GPT-130: Gas purifier module that preconditions feeds for the MKS Instruments ASTeX AX8403A, ensuring sub-ppm contaminants for extended electrode life.
Installation and Maintenance
Pre-installation preparation: For the MKS Instruments ASTeX AX8403A, evaluate cleanroom compatibility by confirming O2 supply purity exceeds 99.5% and ambient conditions align with 5-40°C ranges to prevent condensation issues. Secure mounting hardware for vibration-free placement on tool skids, pre-install inline filters and pressure regulators tuned to 20-50 psig, and conduct electrical grounding checks with a megohmmeter to avert ESD risks during handling.
Installation points: Position the MKS Instruments ASTeX AX8403A in exhaust-compatible zones, connecting gas inlets via 1/4-inch Swagelok fittings torqued to 15 in-lb and power cords to dedicated circuits with GFCI protection. Calibrate output via host software by ramping to 50% setpoint and verifying concentration with a UV analyzer, then leak-test all joints using helium sniffers before full energization.
Maintenance recommendations: Semi-annual servicing of the MKS Instruments ASTeX AX8403A involves inspecting electrode gaps for arcing residue with borescopes and replacing desiccant traps if humidity logs indicate saturation, using only OEM dielectrics to preserve discharge uniformity. Monitor power draw trends monthly to forecast cell degradation, performing full recalibrations post-5000 hours via traceable gas standards, and isolate during cleanings to avoid ozone exposure, ensuring sustained efficiency in fab operations.
Product Guarantee
MKS Instruments guarantees the AX8403A through stringent factory validation, including 100-hour burn-in tests and concentration stability trials to affirm SEMI and CE conformance, underscoring our trust in its unwavering performance for semiconductor excellence. This commitment features a 24-month warranty on components and labor, extendable via service agreements, paired with 24/7 remote monitoring access and field engineers for rapid diagnostics that keep your processes uninterrupted. Our global spares network delivers next-business-day fulfillment, while complimentary application consultations optimize integration for peak output. Choosing the MKS Instruments ASTeX AX8403A means embracing a partnership rooted in innovation, where robust quality and responsive support ensure minimal TCO, fortified yields, and confidence in every ozonated cycle.
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