CDG045D INFICON

Detailed parameter table

Product introduction

The INFICON CDG045D emerges as a benchmark in capacitance diaphragm vacuum gauging from INFICON’s acclaimed SKY series, delivering unparalleled precision for total pressure measurement in sophisticated vacuum environments. This advanced sensor employs an ultra-pure alumina ceramic diaphragm to convert minute deflections into electrical signals, providing gas-independent readings across a broad spectrum from 50 mTorr to 1000 Torr full-scale range. Integrated within the robust SKY platform, the INFICON CDG045D is technically positioned for demanding process control, where its temperature stabilization at 45 °C ensures consistent performance amid thermal fluctuations. In industrial automation setups, it functions as a critical feedback element, interfacing seamlessly with controllers via analog or digital protocols to maintain optimal vacuum levels, thereby safeguarding process integrity and enhancing yield in high-stakes operations.

Core functionalities of the INFICON CDG045D include dual setpoints for automated alarming and control, a patented sensor shield against process contaminants, and one-touch zeroing for rapid field adjustments, all while supporting fieldbus options like EtherCAT for real-time integration. This configuration minimizes downtime through swift warm-up—50% faster than predecessors—and extended recalibration intervals, positioning the INFICON CDG045D as a cost-effective cornerstone in scalable vacuum systems. By mitigating signal drift and enabling predictive diagnostics via its service port, it adds substantial value through reduced maintenance and reliable data fidelity.

Beyond its technical prowess, the INFICON CDG045D reflects INFICON’s legacy in sensor innovation, offering corrosion-resistant construction for longevity in aggressive chemistries. Its compact, energy-efficient design facilitates easy retrofits into existing lines, empowering engineers to achieve finer process orchestration without overhauling infrastructure, ultimately driving efficiency in precision manufacturing paradigms.

Core advantages and technical highlights

Precision engineering forms the bedrock of the INFICON CDG045D, with its ceramic diaphragm exhibiting deflection linearity better than 0.15% across the full scale, enabling absolute accuracy of ±0.25% of reading without gas corrections—crucial for multi-species processes where composition varies. The integrated temperature control at 45 °C employs PID algorithms to hold variance under 0.1 °C, yielding zero stability of <0.2% per year and span drift below 0.15%, far surpassing legacy gauges that demand frequent recalibrations. Dual setpoints, configurable from 0.1% to 99.9% of FSR, trigger relays with <10 ms response, facilitating closed-loop pressure regulation in dynamic cycles.

Operational efficiency distinguishes the INFICON CDG045D, consuming under 4 W during steady state—up to 40% less than comparable units—while achieving warm-up in <10 minutes, accelerating throughput in batch-loaded chambers. Its 0-10 V analog output delivers 14-bit resolution for granular trending, and EtherCAT integration supports cycle times down to 125 µs, synchronizing with PLCs for sub-second adjustments in high-volume deposition. The response curve, with <30 ms settling from 10-90%, ensures timely detection of pressure excursions, while adjustable damping filters mitigate noise in turbulent flows without sacrificing bandwidth.

Durability is woven into the INFICON CDG045D‘s fabric, featuring a patented electrode shield that deflects particulates and condensates, extending MTBF beyond 5 million cycles even in plasma-exposed environments. Rated IP40 for dust ingress and compliant with SEMI S2 for semiconductor safety, it withstands bakeouts to 150 °C and overpressures to 2 bar absolute, with ESD protection to 4 kV. These attributes, validated under IEC 61000-4 for EMC, minimize false triggers in noisy fabs, bolstering system uptime.

Interoperability elevates the INFICON CDG045D in heterogeneous networks, with plug-compatible flanges like DN16 KF or 8VCR ensuring drop-in compatibility with legacy ports, and RS485/RS232 fallbacks for non-fieldbus hosts. Firmware-upgradable via USB diagnostics port, it emulates legacy protocols, easing migrations while unlocking features like remote zero offset (±10% FSR) for multi-gauge arrays.

User-centric design streamlines the INFICON CDG045D‘s lifecycle, from intuitive pushbutton interface for local setup—complete with OLED status display—to comprehensive logging of pressure history for compliance audits. The service port enables tool-free sensor swaps in <5 minutes, preserving calibration traceability, and low-profile mounting options (wall or panel) optimize space in crowded tool interfaces, making elite vacuum metrology accessible across skill levels.

Typical application scenarios

Semiconductor etch chambers harness the INFICON CDG045D for endpoint detection in plasma processes, where its contamination shield preserves accuracy amid fluorine chemistries, maintaining ±0.5 mTorr stability during 300 mm wafer etches at 10-500 mTorr. In these 24/7 cleanroom regimes with rapid pump-downs, the gauge’s fast recovery from atmosphere—<2 minutes—aligns with cycle times under 10 minutes, meeting fab managers’ targets for 99.9% tool availability by integrating EtherCAT triggers that halt recipes on setpoint breaches, curbing over-etch defects and reclaiming 5-10% yield in memory node shrinks.

Coating lines for optical thin films deploy the INFICON CDG045D in e-beam evaporation setups, leveraging its gas-independent output to profile layer thicknesses via pressure ramps from 1-100 mTorr under rotating substrate loads. Facing thermal cycling to 80 °C and hydrocarbon vapors, the ceramic sensor’s corrosion immunity sustains <0.1% drift over 10,000 runs, addressing coaters’ needs for repeatable antireflective stacks—evidenced by variance reductions to 0.5 nm, where dual setpoints automate shutter sequencing for uniform deposition across 1 m² domes, accelerating production for display and laser optics markets.

Pharmaceutical freeze-drying suites utilize the INFICON CDG045D for primary drying control, monitoring chamber pressures at 100-500 mTorr to prevent collapse in biologics vials amid steam-sterilized environments. Its low power draw supports battery-backed logging during 48-hour batches, fulfilling validation engineers’ GMP requirements with timestamped 0-10 V traces for FDA audits, while the zero function compensates for shelf loading effects—enhancing shelf-life predictions by 20% through precise sublimation tracking that minimizes energy use in multi-shelf arrays.

Installation, commissioning and maintenance instructions

Installation preparation

For the INFICON CDG045D, site evaluation per SEMI guidelines is paramount: ambient 10-50 °C, <90% RH noncondensing, and vibration <0.5 g to avert microphonic noise in signal paths. Assemble a kit with 1/4-inch torque wrench at 2 Nm for flange seals, shielded CAT5e for EtherCAT, and KF-16 centering rings with O-rings; verify 24 VDC supply purity (<1% ripple) via dedicated Class 2 circuit. Critical safeguards include bakeout preheating to 120 °C under vacuum, orthogonal routing of sensor cables to avoid EMI from RF sources, and ESD flooring with wrist straps during handling—enforcing LOTO on process gases to enhance safety, while flange alignment lasers expedite leak-free mounts in <15 minutes.

Maintenance suggestions

Daily protocols for the INFICON CDG045D encompass LED scans for overheat indicators and remote zero checks via host software, flagging drifts >0.1% for immediate attention in contamination-vulnerable processes. Diagnostics through the service port—using INFICON’s VGC tools—reveal electrode offsets, resolvable by dry nitrogen purges or setpoint recalibrations, while event logs pinpoint burst exposures exceeding 1 atm. Sensor exchanges involve power-down, flange disconnection, and insertion of calibrated spares with QR-coded traceability, capping interventions at 20 minutes; stockpile OEM shields and diaphragms to preempt failures. Semiannual firmware via USB and stability audits in high-cycle tools ensure <0.05% annual drift, architecting a care framework that sustains the INFICON CDG045D over 7 years with data-driven overhauls.

Service and guarantee commitment

INFICON fortifies the INFICON CDG045D with a two-year warranty shielding against material defects and performance deviations under rated conditions, expandable via service pacts to five years inclusive of annual calibrations traceable to NIST. This bedrock assurance arises from rigorous lifecycle testing to IEC 60721 for thermal cycling and SEMI F5 for particle generation, validating our faith in its ceramic resilience across 10^6 operations. Global support channels offer 24/7 remote access through the INFICON portal, with AI-assisted diagnostics resolving 80% of queries in <1 hour to anchor process continuity.

Our service continuum emphasizes foresight: complimentary stability reports from field data uploads forecast recal needs, while certified depots provide express refurbishments—under 5 days with loaners—for seamless swaps. Hands-on workshops on integration with fab MES systems build internal expertise, and upgrade credits bridge to next-gen models like Stripe variants. INFICON pledges holistic stewardship for the INFICON CDG045D, from RoHS-compliant disposal to innovation roadmaps, ensuring your vacuum ecosystem thrives amid evolving demands with unwavering reliability and partnership.

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