Description
Key Technical Specifications
• Part Number: 0010-37148
• Description: THROTTLE ASSY, DUAL SPRING C-PLUG DIRECT
• Manufacturer: Applied Materials (AMAT)
• Drive Type: C-plug direct
• Spring Configuration: Dual spring
• Primary Application: Vacuum pressure control in process chambers
• Compatibility: AMAT semiconductor process tools (verify exact chamber match)
• Typical Use Environment: CVD, etch, or related vacuum process modules
• Related Variants: Similar to 0010-37151 (univ direct drive), 0010-37163 (2-phase DPS)
• Condition Notes: Available as new surplus or used; full functional test recommended
• Packaging: Anti-static sealed with QC label
Note: Exact dimensions, torque ratings, seal materials, and interface drawings are proprietary. Verify against the OEM datasheet and chamber wiring diagram before installation.
Product Introduction
AMAT 0010-37148 is a dual-spring C-plug direct throttle assembly used for precise vacuum pressure regulation inside Applied Materials process chambers. It mechanically modulates conductance to maintain stable process pressure during deposition or etch cycles.
The dual-spring design provides redundant return force for consistent closure under vacuum cycling. Direct C-plug interface simplifies drive connection compared with leadscrew or multi-phase variants, reducing points of mechanical failure when the correct chamber configuration is matched.
Frequently Asked Questions
Q: Does this throttle assembly support hot-swapping?
A: No. In our experience, these assemblies sit on the vacuum boundary. You must vent the chamber, isolate power to the drive, and follow lock-out procedures. Hot-swap attempts risk seal damage and particle generation.
Q: Is the 0010-37148 obsolete, and are there direct replacements?
A: It remains a supported spare for certain chamber configurations. Close variants such as 0010-37151 (universal direct drive) or 0010-37163 (2-phase DPS) exist. Always confirm the exact chamber type and drive interface before ordering a substitute. Firmware or software changes are not involved, but mechanical pinout and spring preload must match.
Q: Will I lose chamber calibration or process recipes when replacing it?
A: No program or recipe loss occurs because this is a pure mechanical assembly. However, after installation you will need to re-verify pressure control loop response and leak-check the new seals. Photograph the old unit’s orientation and any alignment marks first.
