Description
Product Introduction
MKS FI20162-1 (ASTEX) is a microwave power supply engineered to drive a 3.0 kW magnetron head in plasma processing equipment. It delivers stable, controlled microwave energy used in semiconductor etch, deposition, and surface-treatment systems.
The unit provides regulated power to the magnetron while incorporating protection features that guard against overload, thermal runaway and reverse-polarity conditions. It is commonly found in OEM plasma tools that require consistent RF/microwave delivery for process repeatability.
Installation & Configuration Guide
Phase 1 — Pre-Installation (est. 10–15 min)
De-energize the tool and lock out all power sources. Allow the magnetron and supply to cool fully. Tools: ESD wrist strap, multimeter (Fluke 115), torque tools, microwave-safe interlock verification equipment. Photograph existing cabling, interlock connections and cooling lines.
Phase 2 — Removal (est. 10 min)
Label every power, control, interlock and waveguide or coaxial connection. Disconnect the magnetron head cable and any water or air cooling lines. Unbolt the supply from the rack or chassis and remove carefully.
Phase 3 — Installation (est. 15 min)
Verify the part number FI20162-1 and any revision markings. Mount the unit in the original location. Reconnect cooling, interlocks, control signals and the magnetron drive cable using correct torque values. Confirm all safety interlocks are functional before applying power.
Phase 4 — Power-On & Testing (est. 20 min)
Apply control power first, then main power under supervised conditions. Verify interlock status, ramp power gradually while monitoring reflected power and magnetron current. Confirm stable output at process set-points and run a functional plasma test if the tool allows. Log the replacement and any calibration offsets.
Troubleshooting quick-reference:
- No microwave output → check interlocks, magnetron filament and high-voltage enable
- High reflected power → inspect waveguide/coax integrity and matching network
- Thermal shutdown → verify cooling flow and ambient temperature
