Description
Key Technical Specifications
• Number of measurement axes: 1 or 2
• Board form factor: 6U VME
• Minimum optical power: 1.9 µW
• Position resolution: 0.31 nm (double-pass interferometer)
• Maximum velocity: ±2.1 m/s
• Accuracy at maximum velocity (σ): 0.5 nm
• Cyclic error compensation: Yes
• Compatible lasers: 7702, 7714, 7724
• Scalability: Up to 64 axes in VME chassis (multiple boards)
• Operating temperature: Typically 0 to 40 °C (verify with OEM datasheet)
• Power: Supplied via VME backplane
Product Introduction
Zygo ZMI2402 is a measurement electronics board in the ZMI 2400 series. It converts optical signals from a Zygo laser-driven interferometer into precise displacement data for position metrology applications.
The board delivers 0.31 nm resolution and supports cyclic error compensation to reduce inherent non-linearities. It installs in standard 6U VME chassis and works with compatible Zygo lasers (7702/7714/7724) for semiconductor stages, precision machining, and optical alignment systems requiring scalable multi-axis performance.
Frequently Asked Questions
Q: Does this board support hot-swapping?
A: No. VME systems require power-down or proper slot isolation before insertion or removal. Live insertion risks backplane damage or corrupted measurements. Always follow the chassis manufacturer’s procedure.
Q: Is the ZMI2402 obsolete? Are there direct replacements?
A: The 2400-series boards remain in active use for installed DMI systems. Direct replacements keep the same 1- or 2-axis VME form factor and laser compatibility. Confirm the exact board revision and option codes against the existing unit; mismatch can affect cyclic-error performance or axis mapping.
Q: Will I lose configuration or calibration during replacement?
A: Configuration resides in system software and any non-volatile memory on the board. Record current axis mapping, compensation parameters, and laser serial numbers before swap. After installation, re-verify optical power levels and run a system calibration check with the host software.
