Description
Product Introduction
The LAM 660-097960-001 (ASTEX FI10002) is an RF microwave magnetron head designed for semiconductor plasma etch and CVD systems, specifically the LAM 9400, 9600, and Alliance series chambers. It generates 2.45 GHz microwave energy at up to 1 kW continuous power to ignite and sustain argon/oxygen/fluorine plasmas for photoresist strip, oxide etch, and metal etch processes.
In field deployments of LAM etch tools, this unit stands out for its water-cooled copper anode and 12 V DC filament supply—critical for stable plasma ignition and <1% reflected power during high-density etches. The magnetron couples to the chamber via a WR-284 waveguide and circulator, with directional coupler feedback to the RF generator for automatic power leveling. If you’re replacing an older FI10002 from a 2010s installation, this is the direct OEM equivalent—same waveguide flange, same cooling port layout, same 12 V filament pinout.
Installation & Configuration Guide
Phase 1—Pre-Installation (est. 10 min)
De-energize the 12 V DC filament supply and isolate the water cooling loop. Wait 5 min for capacitor discharge. Grab a Torx T20, wire strippers, and a Fluke 115 multimeter. Export your current RF generator configuration and photograph the existing magnetron’s waveguide flange, cooling lines, and filament connector.
Phase 2—Removal (est. 5 min)
Label every cable and hose before disconnecting—12 V DC +/−, water in/out, waveguide flange. Release the 4× M6 bolts, pull the magnetron straight out perpendicular to the waveguide, and inspect the waveguide gasket for nicks or corrosion.
Phase 3—Installation (est. 10 min)
Strap on your ESD wristband. Verify the part number matches FI10002 660-097960-001. Replicate the cooling line routing from your photos—water in (bottom), water out (top). Seat the unit on the waveguide flange, torque M6 bolts to ~5 N·m, reconnect the N-type filament connector and cooling hoses, then run a pre-power checklist: filament continuity (0.5–1.0 Ω), water flow (1–2 l/min), waveguide seal integrity.
Phase 4—Power-On & Testing (est. 15 min)
Verify filament supply is 12 V DC (±10%). Power up the RF generator and apply 1 kW forward power. Observe the directional coupler—reflected power should be <1% after tuning. Log at least 30 min of stable plasma operation before signing off.
Troubleshooting quick-reference:
- No plasma → check filament continuity, water flow, waveguide gasket
- High reflected power → retune stub tuner, check for arcing or contamination
- Over-temperature → check water flow (1–2 l/min), inlet temperature (15–25 °C)
- Filament open → replace magnetron (non-repairable)
